SCHILLING ENGINEERING® - Cleanroom systems

Cleanroom for microsystem components: Precision in analytics

microfab Service GmbH, an independent service provider in the field of silicon-based microsystems technology, has put a new ISO class 7 Cleanroom into operation. The CleanCell4.0 cleanroom system enables the precise characterization and measurement of MEMS components and systems.

Covering an area of 100 m², the analyticalCleanroom offers a controlled environment specially designed for sensitive measurements and analyses. A separate cleaning room within the cleanroom facility has been equipped with yellow light to provide additional protection for the sensitive products against harmful wavelengths.

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microfab Service GmbH
Product: Cleanroom
Industry: Nanotechnology
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